Volume 35; Issue 12

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Vacuum
Volume 35; Issue 12

Vacuum

Volume 35; Issue 12

1

Editorial

Journal:

Year:

1985

Language:

english

File:

PDF, 45 KB

english, 1985

2

Vacuum and thin films—seeing the wood for the trees!

Journal:

Year:

1985

Language:

english

File:

PDF, 243 KB

english, 1985

3

A very short response time electronic system for the measurement of surface potential changes by means of a static capacitor method

Journal:

Year:

1985

Language:

english

File:

PDF, 790 KB

english, 1985

4

EFSA—a new evaluation method of the depth resolution in depth profiling of multilayer structures

D. Marton, J. László, J. Giber, F.G. Rüdenauer

Journal:

Year:

1985

Language:

english

File:

PDF, 387 KB

english, 1985

5

Structural peculiarities in high-dose Ar+ implanted silicon

S. Simov, M. Kalitzova, P. Danesh, N. Pashov, P. Bonhomme, G. Balossier, A. Djakov

Journal:

Year:

1985

Language:

english

File:

PDF, 1.64 MB

english, 1985

6

Thin films prepared by sputtering MgF2 in an rf planar magnetron

L. Martinů, H. Biederman, L. Holland

Journal:

Year:

1985

Language:

english

File:

PDF, 547 KB

english, 1985

7

An investigation of silver diffusion through gold films by Auger electron spectroscopy

You-ying Liu, Li Wang, Jen-zung Zhan, Lin Chui

Journal:

Year:

1985

Language:

english

File:

PDF, 158 KB

english, 1985

8

A simple/universal rf-generator module system for use in plasma processing

Sven-Åke Eriksson, Anders Westman, Soren Berg

Journal:

Year:

1985

Language:

english

File:

PDF, 259 KB

english, 1985

9

The use of Schottky barrier diodes for the detection of surface contamination and damage in the fabrication of GaAs MESFETS

D.A. Allan, P.J. Smith, J.A. Bowie

Journal:

Year:

1985

Language:

english

File:

PDF, 421 KB

english, 1985

10

Limitation of Ti/TiN diffusion barrier layers in silicon technology

H. Norström, S. Nygren, P. Wiklund, M. Östling, R. Buchta, C.S. Petersson

Journal:

Year:

1985

Language:

english

File:

PDF, 1.35 MB

english, 1985

11

Transmission electron microscopy of Li+ implanted Al films

Amarjit Singh, Emile J Knystautas

Journal:

Year:

1985

Language:

english

File:

PDF, 4.86 MB

english, 1985

12

Few collisions approach for threshold sputtering

Y. Yamamura, J. Bohdansky

Journal:

Year:

1985

Language:

english

File:

PDF, 983 KB

english, 1985

13

Angular distributions of molecular flux from orifices of various thickness

Journal:

Year:

1985

Language:

english

File:

PDF, 308 KB

english, 1985

14

A new low-energy ion implanter for bombardment of cylindrical surfaces

M. Renier, A.A. Lucas, S.E. Donnelly

Journal:

Year:

1985

Language:

english

File:

PDF, 192 KB

english, 1985

15

Atomic absorption evaporation flow rate measurements of alkali metal dispensers

M. Succi, R. Canino, B. Ferrario

Journal:

Year:

1985

Language:

english

File:

PDF, 407 KB

english, 1985

16

Problems on computer processing of SIMS spectra

J. Antal, S. Kugler

Journal:

Year:

1985

Language:

english

File:

PDF, 438 KB

english, 1985

17

Formation of buried insulating layers by high dose oxygen implantation under controlled temperature conditions

M. Bruel, J. Margail, J. Stoemenos, P. Martin, C. Jaussaud

Journal:

Year:

1985

Language:

english

File:

PDF, 1.77 MB

english, 1985

18

Directional effects in kinetic ion-electron emission

B.A. Brusilovsky

Journal:

Year:

1985

Language:

english

File:

PDF, 2.18 MB

english, 1985

19

An improved mass spectrometer inlet system for the analysis of air sensitive materials

R.D. Pilkington, J.R. Upton, J. Delaney, D. Price

Journal:

Year:

1985

Language:

english

File:

PDF, 97 KB

english, 1985

20

Special series on irradiation enhanced adhesion—part I

Journal:

Year:

1985

File:

PDF, 34 KB

1985

21

Oxygen-ion-assisted deposition of thin gold films

P.J. Martin, W.G. Sainty, R.P. Netterfield, A.N. Buckley

Journal:

Year:

1985

Language:

english

File:

PDF, 485 KB

english, 1985

22

Thin film adhesion improvement under photon irradiation

A.J. Kellock, G.L. Nyberg, J.S. Williams

Journal:

Year:

1985

Language:

english

File:

PDF, 474 KB

english, 1985

23

Background of the workshop on residual gas analyzer calibration

Charles R Tilford

Journal:

Year:

1985

Language:

english

File:

PDF, 122 KB

english, 1985

24

Quadrupole mass spectrometers: design considerations and performance: Peter H Dawson, Division of Microstructural Sciences, National Research Council of Canada, Ottawa, Ontario, Canada K1A 0R6

Journal:

Year:

1985

Language:

english

File:

PDF, 122 KB

english, 1985

25

The limitations of the quadrupole mass spectrometer when used for gas analysis: J H Leck, Department of Electrical Engineering and Electronics, The University of Liverpool, Liverpool L69 3Bx, UK

Journal:

Year:

1985

Language:

english

File:

PDF, 251 KB

english, 1985

26

Characteristics of time-of-flight mass spectrometers: Bruce Kendall, Department of Physics, Pennsylvania State University, University Park, Pennsylvania 16802, USA

Journal:

Year:

1985

Language:

english

File:

PDF, 130 KB

english, 1985

27

Fragmentation and isotopic abundance as a means for identifying vacuum gaseous species and for monitoring partial pressure analyser operation: L C Beavis, Photovoltaic Concentrator Research Division, Sandia National Laboratories, Albuquerque, New Mexico 87185, USA

Journal:

Year:

1985

Language:

english

File:

PDF, 130 KB

english, 1985

28

Vacuum measurement calibration system at PPPL: W R Blanchard and D Doersam, Plasma Physics Laboratory, Princeton University, PO Box 451, Princeton, NJ 08544, USA

Journal:

Year:

1985

Language:

english

File:

PDF, 130 KB

english, 1985

29

Calibration of a gas-analytical MS by defined gas bursts: R Dobrozemsky, Osterreichisches Forschungszentrum Seibersdorf, A-2444 Seibersdorf, Austria

Journal:

Year:

1985

Language:

english

File:

PDF, 268 KB

english, 1985

30

Calibration of ultra sensitive helium leak dectectors: Lyle L Bergquist, Martin Marietta Denver Aerospace, PO Box 179, Denver, CO 80201, USA and Y Tito Sasaki, Quantum Mechanics, PO Box 1579, Sonoma, CA 95476, USA

Journal:

Year:

1985

Language:

english

File:

PDF, 138 KB

english, 1985

31

The spinning rotor viscosity gauge as a basis for the calibration of residual gas analysers and mass spectromers: Guenther Reich, Leybold-Heraeus, Cologne, West Germany

Journal:

Year:

1985

Language:

english

File:

PDF, 138 KB

english, 1985

32

Sector mass spectrometer calibration methods applied to residual gas analysers: R E Ellefson, Mound Laboratories, Monsanto Research Corp, Miamisburg, OH 45342, USA

Journal:

Year:

1985

Language:

english

File:

PDF, 138 KB

english, 1985

33

Performance of vacuum transfer standards: R W Hyland, K E McCulloh, C R Tilford and S D Wood, National Bureau of Standards, Gaithersburg, MD 20899, USA

Journal:

Year:

1985

Language:

english

File:

PDF, 281 KB

english, 1985

34

Use of quadrupole RGA's in standard leak calibrations: Tim Moss, Sandia National Laboratory, Box 5800, Albuquerque, N M 87185, USA

Journal:

Year:

1985

Language:

english

File:

PDF, 144 KB

english, 1985

35

Long-term changes in the sensitivity of quadrupole mass spectrometers: H F Dylla, W R Blanchard, P H LaMarche, P McCarthy, Plasma Physics Laboratory, PO Box 451, Princeton University, Princeton, NJ 08544, USA

Journal:

Year:

1985

Language:

english

File:

PDF, 144 KB

english, 1985

36

Experiences in the use of magnetic-sector and quadrupole-field mass spectrometers: Anita Calcatelli, Istituto di Metrologia ‘G Colonnetti’, Strada Delle Cacce, 73, 10135, Torino, Italy

Journal:

Year:

1985

Language:

english

File:

PDF, 281 KB

english, 1985

37

Experience with several quadrupole residual gas analysers: H C Hseuh, 911B Brookhaven National Laboratory, Upton, New York 11973 USA

Journal:

Year:

1985

Language:

english

File:

PDF, 138 KB

english, 1985

38

Mass spectrometry as a quantitative diagnostic for plasma discharges in fusion research: W P Poschenrieder, Max-Planck-Institut für Plasmaphysik, D-8046 Garching, West Germany

Journal:

Year:

1985

Language:

english

File:

PDF, 138 KB

english, 1985

39

Multiple head RGA installation on an electron storage ring: Ron Reid, SERC Daresbury Laboratory, Warrington WA4 4AD, UK

Journal:

Year:

1985

Language:

english

File:

PDF, 138 KB

english, 1985

40

Vacuum compatibility criteria used at SURF-II, the NBS Electron Storage Ring: Lanny R Hughey, National Bureau of Standards, Gaithersburg, MD 20899, USA

Journal:

Year:

1985

Language:

english

File:

PDF, 273 KB

english, 1985

41

Mass spectrometry of atmospheric gases: Konrad Mauersberger, University of Minnesota, Minneapolis, MN 55455, USA

Journal:

Year:

1985

Language:

english

File:

PDF, 136 KB

english, 1985

42

RGA experience with NSLS: Conrad L Foerster, NSLS Bldg 728, Brookhaven National Laboratory, Upton, New York 11973, USA

Journal:

Year:

1985

Language:

english

File:

PDF, 136 KB

english, 1985

43

RGA calibration methods and experience: David Holkeboer and G Lenavitt, Inficon Leybold-Heraeus, East Syracuse, NY 13057, USA

Journal:

Year:

1985

Language:

english

File:

PDF, 136 KB

english, 1985

44

The use of quadrupole mass spectrometers for investigation of surface reactions: Harold Winters, IBM, San José, 5600 Cottle Rd, San José, CA 95193, USA

Journal:

Year:

1985

Language:

english

File:

PDF, 277 KB

english, 1985

45

Application of quadrupole mass spectrometry as a process control technique in plasma processes: Nalin Kumar and K Pourrezaei, Drexel University, Philadelphia, PA 19104, USA

Journal:

Year:

1985

Language:

english

File:

PDF, 143 KB

english, 1985

46

Mass spectrometer measurement of moisture in semiconductor devices—calibration and procedures: Stan Ruthberg, National Bureau of Standards, Gaithersburg, MD 20899, USA

Journal:

Year:

1985

Language:

english

File:

PDF, 143 KB

english, 1985

47

Surface science applications of residual gas analyzers: Richard L Kurtz and T E Madey, Surface Science Division, National Bureau of Standards, Gaithersburg, MD 20899, USA

Journal:

Year:

1985

Language:

english

File:

PDF, 143 KB

english, 1985

48

UK requirements for small mass spectrometer calibration: Peter Nash, National Laboratory, Teddington, TW11 0LW, UK

Journal:

Year:

1985

Language:

english

File:

PDF, 143 KB

english, 1985

49

Present status of quantitative residual gas analysis in Japan: Masatoshi Ono, Electrotechnical Laboratory, 1-1-4, Umezonno Sakura-mura, Ibaraki 305, Japan

Journal:

Year:

1985

File:

PDF, 26 KB

1985

50

Coatings on glass: H K Pulker, Elsevier Science Publishers BV, Amsterdam. 484 pp.

W. Steckelmacher

Journal:

Year:

1985

Language:

english

File:

PDF, 65 KB

english, 1985

51

New patents

Journal:

Year:

1985

Language:

english

File:

PDF, 1.83 MB

english, 1985

52

Obituary

Journal:

Year:

1985

Language:

english

File:

PDF, 152 KB

english, 1985

53

Editorial: Software survey section

Journal:

Year:

1985

Language:

english

File:

PDF, 124 KB

english, 1985

54

Volume contents and author index, volume 35, 185

Journal:

Year:

1985

Language:

english

File:

PDF, 715 KB

english, 1985