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Formation of buried insulating layers by high dose oxygen implantation under controlled temperature conditions
M. Bruel, J. Margail, J. Stoemenos, P. Martin, C. JaussaudVolume:
35
Year:
1985
Language:
english
Pages:
5
DOI:
10.1016/0042-207x(85)90321-5
File:
PDF, 1.77 MB
english, 1985