A new type of hollow cathode discharge gun used in ion beam...

Vacuum 1989 Vol. 39; Iss. 10

A new type of hollow cathode discharge gun used in ion beam coating apparatus and theory analysis

Zhang Shulin, Wang Jichang
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Volume:
39
Year:
1989
Language:
english
Pages:
3
DOI:
10.1016/0042-207x(89)90706-9
File:
PDF, 218 KB
english, 1989
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