RBS, AES and XPS analysis of ion beam induced nitridation...

Vacuum 1994 Vol. 45; Iss. 4

RBS, AES and XPS analysis of ion beam induced nitridation of Si and SiGe alloys

W De Coster, B Brijs, H Bender, J Alay, W Vandervorst
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Volume:
45
Year:
1994
Language:
english
Pages:
7
DOI:
10.1016/0042-207x(94)90307-7
File:
PDF, 900 KB
english, 1994
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