![](/img/cover-not-exists.png)
Energetic ion scattering analysis and glow discharge optical spectrometry characterization of amorphous hydrogenated carbon films elaborated by PACVD
T Petit, A Chevarier, N Chevarier, L Deshayes, M Charbonnier, M RomandVolume:
45
Year:
1994
Language:
english
Pages:
5
DOI:
10.1016/0042-207x(94)90309-3
File:
PDF, 566 KB
english, 1994