Roll-to-roll nanoimprint lithography for patterning on a...

Microelectronic Engineering 2014 / 07 Vol. 123

Roll-to-roll nanoimprint lithography for patterning on a large-area substrate roll

Lim, Hyungjun, Choi, Kee-bong, Kim, Geehong, Lee, Sunghwi, Park, Hyunha, Ryu, Jihyeong, Jung, Sanghee, Lee, Jaejong
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Volume:
123
Language:
english
Journal:
Microelectronic Engineering
DOI:
10.1016/j.mee.2014.03.037
Date:
July, 2014
File:
PDF, 2.51 MB
english, 2014
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