Large-grained (111)-oriented Si/Al/SiO2 structures formed...

Thin Solid Films 2014 / 04 Vol. 557

Large-grained (111)-oriented Si/Al/SiO2 structures formed by diffusion-controlled Al-induced layer exchange

Numata, Ryohei, Toko, Kaoru, Usami, Noritaka, Suemasu, Takashi
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Volume:
557
Language:
english
Journal:
Thin Solid Films
DOI:
10.1016/j.tsf.2013.08.044
Date:
April, 2014
File:
PDF, 1.17 MB
english, 2014
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