Si cap passivation for Ge nMOS applications
Sioncke, S., Vanherle, W., Art, W., Ceuppens, J., Ivanov, Ts., Lin, D., Nyns, L., Delabie, A., Conard, T., Struyf, H., De Gendt, S., Caymax, M., Collaert, N., Thean, A.Volume:
109
Language:
english
Journal:
Microelectronic Engineering
DOI:
10.1016/j.mee.2013.03.149
Date:
September, 2013
File:
PDF, 1.29 MB
english, 2013