Impact of Buffer Layer on Atomic Layer Deposited TiAlO...

IEEE Transactions on Electron Devices 2013 / 01 Vol. 60; Iss. 1

Impact of Buffer Layer on Atomic Layer Deposited TiAlO Alloy Dielectric Quality for Epitaxial-GaAs/Ge Device Application

Dalapati, G. K., Chia, C. K., Mahata, C., Krishnamoorthy, S., Tan, C. C., Tan, H. R., Maiti, Chinmay Kumar, Chi, Dongzhi
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Volume:
60
Language:
english
Journal:
IEEE Transactions on Electron Devices
DOI:
10.1109/TED.2012.2226243
Date:
January, 2013
File:
PDF, 1.89 MB
english, 2013
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