Energy Distribution of Positive Charges in Gate Dielectric:...

IEEE Transactions on Electron Devices 2013 / 05 Vol. 60; Iss. 5

Energy Distribution of Positive Charges in Gate Dielectric: Probing Technique and Impacts of Different Defects

Hatta, Sharifah Wan Muhamad, Ji, Zhigang, Zhang, Jian Fu, Duan, Meng, Zhang, Wei Dong, Soin, Norhayati, Kaczer, Ben, De Gendt, Stefan, Groeseneken, Guido
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Volume:
60
Language:
english
Journal:
IEEE Transactions on Electron Devices
DOI:
10.1109/TED.2013.2255129
Date:
May, 2013
File:
PDF, 927 KB
english, 2013
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