Organic solvent-free water-developable sugar resist...

Microelectronic Engineering 2014 / 06 Vol. 122

Organic solvent-free water-developable sugar resist material derived from biomass in green lithography

Takei, Satoshi, Oshima, Akihiro, Ichikawa, Takumi, Sekiguchi, Atsushi, Kashiwakura, Miki, Kozawa, Takahiro, Tagawa, Seiichi, Oyama, Tomoko G., Ito, Syoji, Miyasaka, Hiroshi
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Volume:
122
Language:
english
Journal:
Microelectronic Engineering
DOI:
10.1016/j.mee.2014.02.026
Date:
June, 2014
File:
PDF, 1.42 MB
english, 2014
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