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Microcantilever suspension using hard masks and a two phase RIE method
Senveli, Sukru U., Tigli, OnurVolume:
121
Language:
english
Journal:
Microelectronic Engineering
DOI:
10.1016/j.mee.2014.05.037
Date:
June, 2014
File:
PDF, 1.26 MB
english, 2014