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Study on applying a flexibility-assisted array air bag imprinting processing technology in the development of linear gradient imprinting and simulating an asymmetric imprinting plane
Weng, Yung-Jin, Weng, Yung-ChunVolume:
122
Language:
english
Journal:
Microelectronic Engineering
DOI:
10.1016/j.mee.2014.02.030
Date:
June, 2014
File:
PDF, 2.23 MB
english, 2014