![](/img/cover-not-exists.png)
Additive electroplating technology as a post-CMOS process for the production of MEMS acceleration-threshold switches for transportation applications
Michaelis, Sven, Timme, Hans-Jörg, Wycisk, Michael, Binder, JosefVolume:
10
Language:
english
Journal:
Journal of Micromechanics and Microengineering
DOI:
10.1088/0960-1317/10/2/304
Date:
June, 2000
File:
PDF, 608 KB
english, 2000