Volume 10; Issue 2

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Journal of Micromechanics and Microengineering
Volume 10; Issue 2

Journal of Micromechanics and Microengineering

Volume 10; Issue 2

1

Ferroelectric thin films for micro-sensors and actuators: a review

Journal:

Journal of Micromechanics and Microengineering

Year:

2000

Language:

english

File:

PDF, 244 KB

english, 2000

2

Micro-systems in biomedical applications

Dario, Paolo, Carrozza, Maria Chiara, Benvenuto, Antonella, Menciassi, Arianna

Journal:

Journal of Micromechanics and Microengineering

Year:

2000

Language:

english

File:

PDF, 707 KB

english, 2000

3

Investigation of the effect of processing steps on stress in a polysilicon structural membrane

Berney, H, Hill, M, Kelleher, A-M, Hynes, E, O'Neill, M, Lane, W A

Journal:

Journal of Micromechanics and Microengineering

Year:

2000

Language:

english

File:

PDF, 996 KB

english, 2000

4

Focused ion beam induced deposition: fabrication of three-dimensional microstructures and Young's modulus of the deposited material

Reyntjens, S, Puers, R

Journal:

Journal of Micromechanics and Microengineering

Year:

2000

Language:

english

File:

PDF, 393 KB

english, 2000

5

Integrating electro-discharge machining and photolithography: work in progress

Reynaerts, Dominiek, Meeusen, Wim, Song, Xiaozhong, Brussel, Hendrik Van, Reyntjens, Steve, Bruyker, Dirk De, Puers, Robert

Journal:

Journal of Micromechanics and Microengineering

Year:

2000

Language:

english

File:

PDF, 483 KB

english, 2000

6

A low-pressure encapsulated deep reactive ion etched resonant pressure sensor electrically excited and detected using `burst' technology

Melin, Jessica, Enoksson, Peter, Corman, Thierry, Stemme, Göran

Journal:

Journal of Micromechanics and Microengineering

Year:

2000

Language:

english

File:

PDF, 397 KB

english, 2000

7

Additive electroplating technology as a post-CMOS process for the production of MEMS acceleration-threshold switches for transportation applications

Michaelis, Sven, Timme, Hans-Jörg, Wycisk, Michael, Binder, Josef

Journal:

Journal of Micromechanics and Microengineering

Year:

2000

Language:

english

File:

PDF, 608 KB

english, 2000

8

Optimized technology for the fabrication of piezoresistive pressure sensors

Merlos, A, Santander, J, Alvarez, M D, Campabadal, F

Journal:

Journal of Micromechanics and Microengineering

Year:

2000

Language:

english

File:

PDF, 397 KB

english, 2000

9

A new model for Si {100} convex corner undercutting in anisotropic KOH etching

Schröder, H, Obermeier, E

Journal:

Journal of Micromechanics and Microengineering

Year:

2000

Language:

english

File:

PDF, 463 KB

english, 2000

10

Ion beam synthesis of polycrystalline SiC on SiO 2 structures for MEMS applications

Serre, Christophe, Pérez-Rodríguez, Alejandro, Morante, Joan Ramón, Esteve, Jaume, Acero, María-Cruz, Kögler, Reinhard, Skorupa, Wolfgang

Journal:

Journal of Micromechanics and Microengineering

Year:

2000

Language:

english

File:

PDF, 211 KB

english, 2000

11

Industrial MEMS on SOI

Renard, Stéphane

Journal:

Journal of Micromechanics and Microengineering

Year:

2000

Language:

english

File:

PDF, 247 KB

english, 2000

12

Modelling of micropumps using unimorph piezoelectric actuator and ball valves

Accoto, D, Carrozza, M C, Dario, P

Journal:

Journal of Micromechanics and Microengineering

Year:

2000

Language:

english

File:

PDF, 163 KB

english, 2000

13

Towards a force-controlled microgripper for assembling biomedical microdevices

Carrozza, Maria Chiara, Eisinberg, Anna, Menciassi, Arianna, Campolo, Domenico, Micera, Silvestro, Dario, Paolo

Journal:

Journal of Micromechanics and Microengineering

Year:

2000

Language:

english

File:

PDF, 318 KB

english, 2000

14

A silicon shadow mask for deposition on isolated areas

Tixier, A, Mita, Y, Gouy, J P, Fujita, H

Journal:

Journal of Micromechanics and Microengineering

Year:

2000

Language:

english

File:

PDF, 242 KB

english, 2000

15

Thick-layer resists for surface micromachining

Journal:

Journal of Micromechanics and Microengineering

Year:

2000

Language:

english

File:

PDF, 2.27 MB

english, 2000

16

Enhancement of elementary displaced volume with electrostatically actuated diaphragms: application to electrostatic micropumps

Français, Olivier, Dufour, Isabelle

Journal:

Journal of Micromechanics and Microengineering

Year:

2000

Language:

english

File:

PDF, 445 KB

english, 2000

17

Composition and structure of NiTiCu shape memory thin films

Frantz-Rodriguez, Nadège, Bosseboeuf, Alain, Dufour-Gergam, Elisabeth, Stambouli-Séné, Valérie, Nouet, Gérard, Seiler, Wilfrid, Lebrun, Jean-Lou

Journal:

Journal of Micromechanics and Microengineering

Year:

2000

Language:

english

File:

PDF, 275 KB

english, 2000

18

Mask materials for powder blasting

Wensink, Henk, Jansen, Henri V, Berenschot, J W, Elwenspoek, Miko C

Journal:

Journal of Micromechanics and Microengineering

Year:

2000

Language:

english

File:

PDF, 343 KB

english, 2000

19

Coupled U-shaped cantilever actuators for 1×4 and 2×2 optical fibre switches

Kopka, Peter, Hoffmann, Martin, Voges, Edgar

Journal:

Journal of Micromechanics and Microengineering

Year:

2000

Language:

english

File:

PDF, 426 KB

english, 2000

20

Thermal actuation of a GaAs cantilever beam

Lalinský, T, Burian, E, Drzík, M, Hascík, S, Mozolová, Z, Kuzmík, J

Journal:

Journal of Micromechanics and Microengineering

Year:

2000

Language:

english

File:

PDF, 232 KB

english, 2000

21

Resistive pressure sensing structures on polyimide membranes on GaAs substrate

Petrini, Ioana, Müller, A, Avramescu, V, Simion, G, Nitescu, N, Vasilache, D, Dascalu, D, Konstantinidis, G, Giacomozzi, F

Journal:

Journal of Micromechanics and Microengineering

Year:

2000

Language:

english

File:

PDF, 148 KB

english, 2000