Metal deposition for microelectronic applications studied...

Nuclear Instruments and Methods in Physics Research 1983 Vol. 218; Iss. 1-3

Metal deposition for microelectronic applications studied by RBS technique

Svend Stensig Eskildsen, Gunnar Sørensen
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Volume:
218
Year:
1983
Language:
english
Pages:
4
DOI:
10.1016/0167-5087(83)91026-8
File:
PDF, 228 KB
english, 1983
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