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Angular distributions and differential sputtering yields of binary compounds as a function of angle of incidence
J. Roth, J. Bohdansky, W. EcksteinVolume:
218
Year:
1983
Language:
english
Pages:
6
DOI:
10.1016/0167-5087(83)91077-3
File:
PDF, 390 KB
english, 1983