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X-ray wavelength optimization of the laser plasma X-ray lithography source
M. Chaker, S. Boily, B. Lafontaine, J.C. Kieffer, H. Pépin, I. Toubhans, R. FabbroVolume:
10
Year:
1990
Language:
english
Pages:
15
DOI:
10.1016/0167-9317(90)90002-b
File:
PDF, 1.05 MB
english, 1990