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Volume 10; Issue 2

Microelectronic Engineering

Volume 10; Issue 2
2

A GHz wafer prober for electron beam testing on a ps time scale

R. Schmitt, D. Winkler, M. Brunner, B. Lischke, G. Winter
Journal:
Microelectronic Engineering
Year:
1990
Language:
english
File:
PDF, 516 KB
english, 1990
3

Novel fabrication technique for dual-gate MOS transistors

R.P. Zingg, B. Hoefflinger
Journal:
Microelectronic Engineering
Year:
1990
Language:
english
File:
PDF, 1.12 MB
english, 1990
4

Simulation of proximity printing

W. Henke, M. Weiss, R. Schwalm, J. Pelka
Journal:
Microelectronic Engineering
Year:
1990
Language:
english
File:
PDF, 1.52 MB
english, 1990
5

Calendar of events

Journal:
Microelectronic Engineering
Year:
1990
Language:
english
File:
PDF, 202 KB
english, 1990
6

Difffraction effects in submicron contact or proximity printing

W. Henke, R. Schwalm, M. Weiss, J. Pelka
Journal:
Microelectronic Engineering
Year:
1990
Language:
english
File:
PDF, 1.04 MB
english, 1990