The fabrication of submicron gated wires on GaAs/AlGaAs heterostructures using low energy Ga ion beam damage
E.H. Linfield, D.A. Ritchie, G.A.C. Jones, J.E.F. Frost, D.C. Peacock, M. PepperVolume:
11
Year:
1990
Language:
english
Pages:
4
DOI:
10.1016/0167-9317(90)90064-z
File:
PDF, 336 KB
english, 1990