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0.15μm E-Beam T-shaped gates for GaAs FETs
A. Chisholm, S. Sainson, M. Feuillade, A. CleiVolume:
11
Year:
1990
Language:
english
Pages:
4
DOI:
10.1016/0167-9317(90)90080-d
File:
PDF, 368 KB
english, 1990