Electron beam lithography of 100 nm T-gates for GaAs MESFETs
B. Wolfstädter, A. Colquhoun, K. WegenerVolume:
11
Year:
1990
Language:
english
Pages:
4
DOI:
10.1016/0167-9317(90)90085-8
File:
PDF, 344 KB
english, 1990