Fabrication of 100nm-period gratings using achromatic holographic lithography
A. Yen, R.A. Ghanbari, E.H. Anderson, Henry I. SmithVolume:
11
Year:
1990
Language:
english
Pages:
5
DOI:
10.1016/0167-9317(90)90098-e
File:
PDF, 376 KB
english, 1990