X-ray lithography at the super-ACO storage ring of Orsay(France)
F. Rousseaux, A.M. Haghiri-Gosnet, C. Khan Malek, B. Kebabi, H. Launois, J. DurandVolume:
11
Year:
1990
Language:
english
Pages:
4
DOI:
10.1016/0167-9317(90)90103-z
File:
PDF, 322 KB
english, 1990