Pulse plating of quarter micron gold patterns on silicon X-ray masks
B. Löchel, A. Macioßek, J. Trube, H.-L. HuberVolume:
11
Year:
1990
Language:
english
Pages:
4
DOI:
10.1016/0167-9317(90)90115-a
File:
PDF, 369 KB
english, 1990