Laser plasma x-ray lithography using novolak resists
M. Chaker, S. Boily, H. Lafontaine, P.P. Mercier, J.F. Currie, J.C. Kieffer, H. PepinVolume:
11
Year:
1990
Language:
english
Pages:
4
DOI:
10.1016/0167-9317(90)90121-9
File:
PDF, 266 KB
english, 1990