Design of a non-equisectored 20-electrode deflector for...

Design of a non-equisectored 20-electrode deflector for e-beam lithography using a field emission electron beam

E-R Weidlich
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Volume:
11
Year:
1990
Language:
english
Pages:
4
DOI:
10.1016/0167-9317(90)90127-f
File:
PDF, 371 KB
english, 1990
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