Advances in the electron optical design of a multi e-beam comb probe printer
H. Schäfer, P. Schäffer, S. Kleindiek, K.-H. HerrmannVolume:
11
Year:
1990
Language:
english
Pages:
4
DOI:
10.1016/0167-9317(90)90129-h
File:
PDF, 385 KB
english, 1990