Online exposure dose correction during electron beam...

Online exposure dose correction during electron beam pattern delineation by blanking pulse width modulation.

N.K.L. Raja, K.J. Rangra, M. Singh
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Volume:
11
Year:
1990
Language:
english
Pages:
4
DOI:
10.1016/0167-9317(90)90133-e
File:
PDF, 271 KB
english, 1990
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