High throughput electron lithography for integrated optoelectronic grating structures
S.J. Clements, R.S. Baulcomb, C.B. Rogers, A.P. Wright, A.S. GozdzVolume:
11
Year:
1990
Language:
english
Pages:
4
DOI:
10.1016/0167-9317(90)90134-f
File:
PDF, 250 KB
english, 1990