Resolution limitation in EBL optical grating fabrication on...

Microelectronic Engineering 1990 Vol. 11; Iss. 1-4

Resolution limitation in EBL optical grating fabrication on InGaAsP/InP substrate

M. Gentili, A. Lucchesini, L. Grella, G. Meneghini, L. Scopa
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Volume:
11
Year:
1990
Language:
english
Pages:
4
DOI:
10.1016/0167-9317(90)90135-g
File:
PDF, 322 KB
english, 1990
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