Shadow electron beam 1:1 scale printing with 0.1 μm size elements
R.Kh. Makhmutov, K.A. Valiev, L.V. Velikov, V.S. YakuninVolume:
11
Year:
1990
Language:
english
Pages:
7
DOI:
10.1016/0167-9317(90)90137-i
File:
PDF, 465 KB
english, 1990