Focused ion beam machining of mirror facets of a monolithically integrated GaAs/GaAlAs double heterojunction (DH) laser and its optical waveguide.
G.Ben Assayag, P. Sudraud, J. Gierak, D. Remiens, L. Menigaux, L. DugrandVolume:
11
Year:
1990
Language:
english
Pages:
4
DOI:
10.1016/0167-9317(90)90141-f
File:
PDF, 409 KB
english, 1990