Free volume and relaxation effects in polymer layers:...

Free volume and relaxation effects in polymer layers: application to the spin coating and bake processes

P. Paniez, M. Pons, O. Joubert
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Volume:
11
Year:
1990
Language:
english
Pages:
4
DOI:
10.1016/0167-9317(90)90153-k
File:
PDF, 324 KB
english, 1990
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