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New high resolution and high sensitivity deep UV, x-ray, and electron beam resists
Michael Hatzakis, Kevin J. Stewart, Jane M. Shaw, Stephen A. RishtonVolume:
11
Year:
1990
Language:
english
Pages:
3
DOI:
10.1016/0167-9317(90)90156-n
File:
PDF, 208 KB
english, 1990