Silylation of resist materials using di- and polyfunctional organosilicon compounds
E. Babich, J. Paraszczak, D. Witman, R. McGouey, M. Hatzakis, J. Shaw, N. ChouVolume:
11
Year:
1990
Language:
english
Pages:
4
DOI:
10.1016/0167-9317(90)90159-q
File:
PDF, 349 KB
english, 1990