Chemical amplification of resist lines (CARL)
M. Sebald, R. Sezi, R. Leuschner, H. Ahne, S. BirkleVolume:
11
Year:
1990
Language:
english
Pages:
4
DOI:
10.1016/0167-9317(90)90164-o
File:
PDF, 398 KB
english, 1990