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Aqueous phase silylation a new route to plasma developable high resolution resists
R. Sezi, R. Leuschner, M. Sebald, H. Ahne, S. Birkle, H. BorndörferVolume:
11
Year:
1990
Language:
english
Pages:
4
DOI:
10.1016/0167-9317(90)90165-p
File:
PDF, 304 KB
english, 1990