Applications of inorganic resists to sub-micron fabrication
Mino Green, C.J. Aidinis, F. Khaleque, Y. FengVolume:
11
Year:
1990
Language:
english
Pages:
4
DOI:
10.1016/0167-9317(90)90166-q
File:
PDF, 359 KB
english, 1990