A simple bilayer lift-off process
David F. Witman, Jane M. Shaw, Michael Hatzakis, Edward D. Babich, Jurij R. Paraszczak, Kevin J. StewartVolume:
11
Year:
1990
Language:
english
Pages:
4
DOI:
10.1016/0167-9317(90)90168-s
File:
PDF, 318 KB
english, 1990