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On double layer PMMA resist systems: Development rates and molecular weight distributions of commercial PMMA resists
A.H. Verbruggen, B.G.M. de Lange, B.A.C. Rousseeuw, H.A.H. Billiet, S. RadelaarVolume:
11
Year:
1990
Language:
english
Pages:
4
DOI:
10.1016/0167-9317(90)90171-o
File:
PDF, 283 KB
english, 1990