Image reversal of diazo-novolak resist by concurrent bake...

Image reversal of diazo-novolak resist by concurrent bake promoted and photoacid catalyzed esterifications

Wen-An Loong, Hwang-Kuen Lin
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Volume:
11
Year:
1990
Language:
english
Pages:
4
DOI:
10.1016/0167-9317(90)90172-p
File:
PDF, 379 KB
english, 1990
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