Image reversal of diazo-novolak resist by concurrent bake promoted and photoacid catalyzed esterifications
Wen-An Loong, Hwang-Kuen LinVolume:
11
Year:
1990
Language:
english
Pages:
4
DOI:
10.1016/0167-9317(90)90172-p
File:
PDF, 379 KB
english, 1990