Evaluation of dry etch damage in nano-structures by direct transmission electron microscopic examination
R. Cheung, A. Birnie, J.N. Chapman, S. Thoms, C.D.W. WilkinsonVolume:
11
Year:
1990
Language:
english
Pages:
4
DOI:
10.1016/0167-9317(90)90177-u
File:
PDF, 274 KB
english, 1990