CW and time resolved luminescence study of dry etch damage...

CW and time resolved luminescence study of dry etch damage in semiconductor wires

B.E. Maile, G. Mayer, R. Germann, A. Forchel, H.P. Meier
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Volume:
11
Year:
1990
Pages:
4
DOI:
10.1016/0167-9317(90)90178-v
File:
PDF, 195 KB
1990
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