High quality plasma planarization: methodology and application to maskless selective interconnection
P. Rabinzohn, C. Villalon, F. Pasqualini, S. GourrierVolume:
11
Year:
1990
Language:
english
Pages:
4
DOI:
10.1016/0167-9317(90)90179-w
File:
PDF, 289 KB
english, 1990