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The effect of CH4/H2 RIE on thin highly doped GaAs layers
N.I. Cameron, S.P. Beaumont, C.D.W. Wilkinson, N.P. Johnson, A.H. Kean, C.R. StanleyVolume:
11
Year:
1990
Language:
english
Pages:
4
DOI:
10.1016/0167-9317(90)90181-r
File:
PDF, 298 KB
english, 1990