Application of Monte Carlo modelling to linewidth control...

Application of Monte Carlo modelling to linewidth control for electron beam direct write over device topography

T.A. Fretwell, P.L. Jones
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
11
Year:
1990
Language:
english
Pages:
6
DOI:
10.1016/0167-9317(90)90186-w
File:
PDF, 418 KB
english, 1990
Conversion to is in progress
Conversion to is failed