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Novel bipolar transistor isolation structure using combined selective epitaxial growth and planarization technique
J.N. Burghartz, J. Warnock, J.D. Cressler, C.L. Stanis, R.C. McIntosh, J.Y.-C. Sun, J.H. Comfort, J.M.C. Stork, K.A. Jenkins, E.F. Crabbé, W. Lee, M. GilbertVolume:
19
Year:
1992
Language:
english
Pages:
4
DOI:
10.1016/0167-9317(92)90489-e
File:
PDF, 325 KB
english, 1992