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Cleaning technology for improved gate oxide integrity
M. Meuris, S. Verhaverbeke, P.W. Mertens, H.F. Schmidt, M.M. Heyns, M. Kubota, A. Philipossian, K. Dillenbeck, D. Gräf, A. Schnegg, R. de BlankVolume:
22
Year:
1993
Language:
english
Pages:
8
DOI:
10.1016/0167-9317(93)90123-m
File:
PDF, 655 KB
english, 1993