Alkyl-trichlorosilane monolayer as ultra-thin insulating film for silicon MIS devices
D. Vuillaume, P. Fontaine, J. Collet, D. Deresmes, M. Garet, F. RondelezVolume:
22
Year:
1993
Language:
english
Pages:
4
DOI:
10.1016/0167-9317(93)90140-z
File:
PDF, 317 KB
english, 1993